Area-Selective Etching of Poly(methyl methacrylate) Films by
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Preparation of porous polyimide films by selective decomposition of poly(methyl methacrylate) from PI/PMMA-blended films - Hua-Zhen Zhou, Mao-Sheng Zhan, Kai Wang, Xiao-Yan Liu, 2013
Color online) (a) Schematic representation of ion sputter etch yield
Fluorine-containing polymeric inhibitor for highly selective and durable area-selective atomic layer deposition - ScienceDirect
Fluorine-containing polymeric inhibitor for highly selective and durable area-selective atomic layer deposition - ScienceDirect
A review of polymethyl methacrylate (PMMA) as a versatile lithographic resist – With emphasis on UV exposure - ScienceDirect
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Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition
Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition
PDF) Is poly(Methyl methacrylate) (PMMA) a suitable substrate for ALD?: A review
Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers
Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers
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Area-Selective Atomic Layer Deposition Patterned by Electrohydrodynamic Jet Printing for Additive Manufacturing of Functional Materials and Devices
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